Unit UFC-8100 High Flow MFC
Flow Rate: High Flow at 20SLPM
Gas: N2
Features at a glance
- For non-corrosive and non-ultraclean process gas applications
- Drop-in replacement for any elastomeric O-ring, which is inexpensive, well characterized, and offers reliable resealing.
- Sealed with an elastomeric O-ring, which is inexpensive, well characterized, and offers reliable resealing
- Easy configuration change and maintenance
- Field proven — MTBF of 536,000 hours and ultra-low drift of less than 0.6% per year to reduce year-to-year maintenance and increase uptime
| Condition (eBay) | New |
|---|---|
| Item Location | US |
| Zip Code (Item Location) | 95112 |
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Specifications
Operational
| Mass Range: | |
| RGA200 | 1 to 200 amu |
| Mass filter type | Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”) |
| Detector type | Faraday cup (FC) – standard
Electron multiplier (CDEM) – optional |
| Resolution
(per AVS standard 2.3). |
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass range. |
| Sensitivity (A/Torr)* | 2.10-4 (FC)
<200 (CDEM). User adjustable throughout high voltage range. |
| Minimum detectable
partial pressure (MDPP)* |
5.10-11 Torr (FC).
5.10-14 Torr (CDEM). |
| Operating pressure range | 10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM) |
| Max. bakeout temperature (without
ECU) |
300qC |
| Operating Temperature | 70qC (max.) |
| Recommended bakeout temperature | 200°C (O100HJR Heater Jacket recommended) |
| Total press.
measurement |
Available with FC measurements only |
* Measured with N2 @ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV ion energy and 1 mA electron emission current. Ionizer
| Design | Open ion source, cylindrical symmetry. |
| Operation | Electron impact ionization. |
| Material | Stainless steel, type 304. |
| Filament | Thoriated Iridium (dual) with firmware protection. Field |
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• compact design
• no lubricant maintenance or sealing water administration
• free from installation restrictions
• low power consumption
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MKS Sensor Model number 750B12TCB26C
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