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  • $5,800

    On-Board® Cryopumps

    The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.

    Key Features

    • Fast Regen™ capability that extends cryopump performance between regenerations
    • Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
    • An  embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
    • Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation

    AVAILABILITY: In stock

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