CTI-Cryogenics Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs. Providing low operating costs and fast, easy maintenance, these cryopumps deliver high reliability and bottom-line performance backed by responsive service you can count on.
The 200 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA’s provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.
1 to 200 amu
Mass filter type
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”)
Faraday cup (FC) – standard
Electron multiplier (CDEM) – optional
(per AVS standard 2.3).
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass range.
<200 (CDEM). User adjustable throughout high voltage range.
5.10-11 Torr (FC).
5.10-14 Torr (CDEM).
Operating pressure range
10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM)
Max. bakeout temperature (without
Recommended bakeout temperature
200°C (O100HJR Heater Jacket recommended)
Available with FC measurements only
* Measured with N2 @ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV ion energy and 1 mA electron emission current. Ionizer
Open ion source, cylindrical symmetry.
Electron impact ionization.
Stainless steel, type 304.
Thoriated Iridium (dual) with firmware protection. Field
Dry multi-stage Roots technology, SD versions, ACP pumps with a pumping speed of max. 37 m3/h
No particle contamination, thanks to frictionless design: no wearing parts in the pumped gases path
No hydrocarbon vapors back streaming: ACP series pumps are free of lubricant inside the pumping module
Constant performances (Pumping speed, max. and ultimate pressure)
High reliability: thanks to our expertise of dry multi-stage Roots pumps since 1988
Low maintenance costs: no annual field service, complete overhaul only every 20000 hours for ACP 40
Condensable vapor ability: with gas ballast ports and drainable silencer
Features & Benefits
• no particle contamination
• high reliability
• constant performances
• low maintenance costs
• condensable vapor ability
• ideal replacement for scroll and oil-sealed pumps
• several gas port options, including purge gas & gas ballast
• unsurpassed long-term stability and high reliability in even the
most demanding applications
• designed for applications that require pumping of clean (dust-
free) and non-corrosive gases