SRS RGA200 Gas Analyzer
The 200 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA’s provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.
|RGA200||1 to 200 amu|
|Mass filter type||Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”)
|Detector type||Faraday cup (FC) – standard
Electron multiplier (CDEM) – optional
(per AVS standard 2.3).
|Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass range.
|Sensitivity (A/Torr)*||2.10-4 (FC)
<200 (CDEM). User adjustable throughout high voltage range.
|5.10-11 Torr (FC).
5.10-14 Torr (CDEM).
|Operating pressure range||10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM)
|Max. bakeout temperature (without
|Operating Temperature||70qC (max.)|
|Recommended bakeout temperature||200°C (O100HJR Heater Jacket recommended)|
|Available with FC measurements only|
* Measured with N2 @ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV ion energy and 1 mA electron emission current. Ionizer
|Design||Open ion source, cylindrical symmetry.|
|Operation||Electron impact ionization.|
|Material||Stainless steel, type 304.|
|Filament||Thoriated Iridium (dual) with firmware protection. Field|