Unit UFC-1660 1SCCM/O2
$250 $150
Unit UFC-1660 MFC
Flow: 1sccm
Gas: O2
Unit is calibrated from Laminar with certificate and is ready to ship.
Condition (eBay) | New |
---|---|
Item Location | US |
Zip Code (Item Location) | 95112 |
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- Adixen
- Anest Iwata
- Axcelis
- Chiller
- compressor
- Consulting
- Cooling
- cryo
- cryogenic
- cryopump
- CTI
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- Dry Pump
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- Residual Gas Analyzer
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Specifications
Operational
Mass Range: | |
RGA200 | 1 to 200 amu |
Mass filter type | Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”) |
Detector type | Faraday cup (FC) – standard
Electron multiplier (CDEM) – optional |
Resolution
(per AVS standard 2.3). |
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass range. |
Sensitivity (A/Torr)* | 2.10-4 (FC)
<200 (CDEM). User adjustable throughout high voltage range. |
Minimum detectable
partial pressure (MDPP)* |
5.10-11 Torr (FC).
5.10-14 Torr (CDEM). |
Operating pressure range | 10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM) |
Max. bakeout temperature (without
ECU) |
300qC |
Operating Temperature | 70qC (max.) |
Recommended bakeout temperature | 200°C (O100HJR Heater Jacket recommended) |
Total press.
measurement |
Available with FC measurements only |
* Measured with N2 @ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV ion energy and 1 mA electron emission current. Ionizer
Design | Open ion source, cylindrical symmetry. |
Operation | Electron impact ionization. |
Material | Stainless steel, type 304. |
Filament | Thoriated Iridium (dual) with firmware protection. Field |
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