Unit UFC-1660 MFC
Flow: 1sccm
Gas: O2
Unit is calibrated from Laminar with certificate and is ready to ship.
| Condition (eBay) | New |
|---|---|
| Item Location | US |
| Zip Code (Item Location) | 95112 |
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Specifications:
Type of Product: Turbo Pump
Condition: Rebuilt by Seller with 6 month Warranty
Part Number: 85677
Inlet: ISO160
Exhaust: KF25
Vent Valve: Fixed
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• air-cooled, oil-free scroll-type vacuum
• low noise & vibration
• compact design
• no lubricant maintenance or sealing water administration
• free from installation restrictions
• low power consumption
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The 200 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA’s provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.
Specifications
Operational
| Mass Range: | |
| RGA200 | 1 to 200 amu |
| Mass filter type | Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”) |
| Detector type | Faraday cup (FC) – standard
Electron multiplier (CDEM) – optional |
| Resolution
(per AVS standard 2.3). |
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass range. |
| Sensitivity (A/Torr)* | 2.10-4 (FC)
<200 (CDEM). User adjustable throughout high voltage range. |
| Minimum detectable
partial pressure (MDPP)* |
5.10-11 Torr (FC).
5.10-14 Torr (CDEM). |
| Operating pressure range | 10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM) |
| Max. bakeout temperature (without
ECU) |
300qC |
| Operating Temperature | 70qC (max.) |
| Recommended bakeout temperature | 200°C (O100HJR Heater Jacket recommended) |
| Total press.
measurement |
Available with FC measurements only |
* Measured with N2 @ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV ion energy and 1 mA electron emission current. Ionizer
| Design | Open ion source, cylindrical symmetry. |
| Operation | Electron impact ionization. |
| Material | Stainless steel, type 304. |
| Filament | Thoriated Iridium (dual) with firmware protection. Field |
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CTI-Cryogenics Cryo-Torr Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications. For added flexibility, you can add your own customized controls and supporting peripherals to meet your specific application needs. Providing low operating costs and fast, easy maintenance, these cryopumps deliver high reliability and bottom-line performance backed by responsive service you can count on.
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