The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
Fast Regen™ capability that extends cryopump performance between regenerations
Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation