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On-Board® Cryopumps
The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
Key Features
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
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Brooks CTI-Cryogenics 9600 Helium Compressor - REBUILT by HVS! Reconfigurable to these Manufacturer OEM Numbers: 8135900G001 low voltage 8135908G001 low voltage
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• air-cooled, oil-free scroll-type vacuum
• low noise & vibration
• compact design
• no lubricant maintenance or sealing water administration
• free from installation restrictions
• low power consumption
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