Unit UFC-8100 High Flow MFC
Flow Rate: 1SLPM
Gas: H2SE
Features at a glance
- For non-corrosive and non-ultraclean process gas applications
- Drop-in replacement for any elastomeric O-ring, which is inexpensive, well characteristized, and offers reliable resealing.
- Sealed with an elastomeric O-ring, which is inexpenseive, well characterized, and offers relieable resealing
- Easy configuration change and maintenance
- Field proven — MTBF of 536,000 hours and ultra-low drift of less than 0.6% per year to reduce year-to-year maintenance and increase uptime
| Condition (eBay) | New |
|---|---|
| Item Location | US |
| Zip Code (Item Location) | 95112 |
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The 200 amu residual gas analyzers from SRS offer exceptional performance and value. These RGA’s provide detailed gas analysis of vacuum systems at about half the price of competitive models. Each RGA system comes complete with a quadrupole probe, electronics control unit (ECU), and a real-time Windows software package that is used for data acquisition and analysis, as well as probe control.
Specifications
Operational
| Mass Range: | |
| RGA200 | 1 to 200 amu |
| Mass filter type | Quadrupole
(Cylindrical rods, rod diameter: 0.25”, rod length: 4.5”) |
| Detector type | Faraday cup (FC) – standard
Electron multiplier (CDEM) – optional |
| Resolution
(per AVS standard 2.3). |
Better than 0.5 amu @ 10% peak height
Adjustable to constant peak width throughout the entire mass range. |
| Sensitivity (A/Torr)* | 2.10-4 (FC)
<200 (CDEM). User adjustable throughout high voltage range. |
| Minimum detectable
partial pressure (MDPP)* |
5.10-11 Torr (FC).
5.10-14 Torr (CDEM). |
| Operating pressure range | 10-4 Torr to UHV (FC)
10-6 Torr to UHV (CDEM) |
| Max. bakeout temperature (without
ECU) |
300qC |
| Operating Temperature | 70qC (max.) |
| Recommended bakeout temperature | 200°C (O100HJR Heater Jacket recommended) |
| Total press.
measurement |
Available with FC measurements only |
* Measured with N2 @ 28 amu with 1 amu full peak width @ 10% height, 70 eV electron energy, 12 eV ion energy and 1 mA electron emission current. Ionizer
| Design | Open ion source, cylindrical symmetry. |
| Operation | Electron impact ionization. |
| Material | Stainless steel, type 304. |
| Filament | Thoriated Iridium (dual) with firmware protection. Field |
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• air-cooled, oil-free scroll-type vacuum
• low noise & vibration
• compact design
• no lubricant maintenance or sealing water administration
• free from installation restrictions
• low power consumption
1 in stock
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1 in stock
Specifications:
Type of Product: Turbo Pump
Condition: Rebuilt by Seller with 6 month Warranty
Part Number: 85677
Inlet: ISO160
Exhaust: KF25
Vent Valve: Fixed
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On-Board® Cryopumps
The Brooks CTI-Cryogenics On-Board cryogenic vacuum pumps speed integration and improve system operation is the world standard for reliability and performance. Delivering superior up-time, On-Board cryopumps and consistent performance, with fully integrated controls and supporting peripherals, deliver superior up-time to increase overall tool productivity and up-time.
Key Features
- Fast Regen™ capability that extends cryopump performance between regenerations
- Simultaneous regeneration capability, enabled by networking your cryopumps, that speeds overall system regeneration
- An embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability
- Sophisticated software and easy-to-use graphical user interfaces to significantly improve performance and operation
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